An instrument-based and methodical system of electrophysical methods for the control of sub-micron CMOS integrated circuit technology has been developed and implemented. The programmable commutation of the switching components is produced allowing the use of a wide range of complementary measurement techniques to obtain information required for the correction of technology process. The system includes software to control measurement and calculation of the required characteristics.

The study of variations of hardness a number of representatives materials of various classes have been carried out in a wide range of loads and imprint depths. The usability of these substances and the range limits for the employing of testing blocks from these materials for the calibration of nanoindentation instruments are shown.

Explored ways of building of measurement complex with variable structure. For high-precision determination of the parameters of the dynamic object, measurement complex with an intelligent component is developed. Algorithmic support of the complex formed based on the theory of functional systems of P.K.Anohin, using scalar estimation algorithm, the self - organization algorithm with reservation trends and criterion the degree of observability of state variables. The processing complex algorithms used in the model with a higher degree of observability of state variables. Intelligent component consists of algorithms for constructing predictive models and comparing the forecast with the current measurement results.

The methodical apparatus of test - error correcting codes random access memory, which consists in the fact that for the detection of errors arising from use of a linear code, and revealing hidden errors identification configuration (erroneous bits) times the error and its correction are carried out on the analysis of the response, obtained by supplying test action.

The article discusses the possibility of creating a comparator for verification of raster grids. In an exemplary means proposed to use extreme precision photoelectric scanning countable interpolation linear displacement measurement system, which has high levels of accuracy, reliability and performance.

The accounting of the laser line width and spectral function in the Raman lidar in hydrocarbon molecules sensing in the atmosphere has been fulfilled. The estimation of the relative error of the studied molecules concentration measurements was given. The isobutane molecules were used as an example of the hydrocarbons.

Calculation the lowest achievable short-term frequency instability of the passive hydrogen frequency standard is carried out. The method of a quantum discriminator figure of meritexperimental measuring is presented. The relationship between the figure of merit and frequency instability of passive hydrogen frequency standard is shown. It is proved that the discovered effect of maser spectral line splitting limits short-term stability of standard.

The article describes principles of the process diagnosis of the precision processing of the parts made from refractory materials by ceramic cutting tool based on vibroacustic dimension. A number of experimental results illustrating vibration signal sensitivity to the changes arising in the cutting area are represented in the article. The functional scheme for methods implementation of vibroacustic test operation of the part precision processing is described.

The article provides a rationale for the method and device used for conducting automated non-destructive material porosity tests. Design of the control device and principles of operation are described. The accuracy of the material porosity control for the gas-dynamic method is determined.

The method of calibration applicable to digital temperature meters used in aerological radiosondes is considered. The calibration error is shown to be the main source of errors for temperature meters produced in Russia. The digital temperature meter error of calibration, carried out in accordance with table calibration procedure, is shown to be significantly smaller than the error of calibration, performed by means of analytical function.

Electron thermostating elements (ETE) mounted on the regulating radiator valves are developed. ETE are designed for the automatic controlling of the consumption of heat transfer agent in the heating systems by a special program. So, ETE are intended for the controlling of the temperature in the heated placements. ETE have autonomous power supply. Proposed original hardware and software solutions of ETE, optimization of their work in conjunction with low power consumption of the electronic circuit allowed sufficiently increase autonomous operation time of such devices.

The method and procedure for restoration of the true temperature during of selective laser melting of metal powder based on determination of temperature on the molten pool surface using infrared camera are proposed. In the case of powder melting, the developed method allows to determine The influence of several key selective laser melting parameters on the molten pool shape was estimated.

The article considers functional resources for development of magnetic measurement standards enabling to shift lower limit of reproducibility and transfer of magnetic flux density unit range from 1000 nT to 10 nT. The methodology and instrumental potential, for solving the problem, are based on functional resources of a standard three-component DC magnetic flux density comparator and standard helium-cesium magnetometer as a part of the state primary standard of magnetic flux density unit, magnetic flux, magnetic moment and magnetic flux density gradient GET 12-2011.

An experimental study of field-effect transistors KП304А in the charge-discharge mode of the gate capacitor in the key diagram from voltage U to the voltage Uo (U>U0). The measurement method of this process using key circuit and digital oscilloscope B-421 is offered.

The algorithms of logical comparator with enhanced functionality and a variety of structural implementations of algorithms for comparison the frequencies and phases of the input pulse signal of phase-locked loop are developed.

Electromagnetic acoustic transducer, which allows to determine the elastic properties of materials and to carry out ultrasonic testing of products with high reliability detection of extremely dangerous cracks was designed.

A spectrum of neutrons near the target of a neutron generator NG-24M was measured by neutron activation method. Spectrum of neutrons is represented in analytical form as superposition of physically substantiated spectra.

The theoretical analysis of a relative error of measurement of polarizability off cells, using a dielectrophoresis method is described. The error magnitude allows ensuring the objective evaluation of the course of the disease dynamics and the effectiveness of the treatment.

The technique of manufacturing silver chloride electrodes and their subsequent selection for the State primary standard of pH the activity of hydrogen ions in aqueous solutions.