Эталонные средства измерений в оптической интерферометрии высокого разрешения
Abstract
The complex of standard measuring instruments in composition of a set of standard measures of values of height of step and value of period intended for the three-dimensional calibration of test equipment based on interference optical microscopes and scanning probe microscopes used for measurement of small distances is considered.
About the Authors
Н. Моисеев
Всероссийский научно-исследовательский институт оптико-физических измерений,Москва
Russian Federation
Russian Federation
С. Золотаревский
Всероссийский научно-исследовательский институт метрологической службы, Москва
Russian Federation
Russian Federation
References
1. ISO/TR 14999-1:2005.Optics and photonics.Interferomotric measurement of optical elements and optical systems. Part 1: Terms, definitions and fundamental relationships.
2. ISO/TR 14999-2:2005.Optics and photonics.Interferomotric measurement of optical elements and optical systems. Part 2: Measurement and evaluation techniques.
3. ISO/TR 14999-3:2005.Optics and photonics.Interferomotric measurementof optical elements and optical systems. Part 3: Calibration and validation of interferometric test equipment and measurements.
Review
For citations:
, . Izmeritel`naya Tekhnika. 2012;(8):35-37. (In Russ.)
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