Тепловые эффекты при низковольтном электронно-зондовом рентгеноспектральном микроанализе с нанометровой локальностью

Abstract

Evaluation is made of thermal influence of the electron probe in the low-voltage x-ray nanoanalysis. It is shown that despite significant increase in volumetric power density, due to electron irradiation, for most inorganic materials thermal effects are of no significance. For orogenic materials, these effects can significantly affect the results, causing destruction of a sample.