Экспериментальные исследования трёхмерной реконструкции рельефных структур по стереоизображениям, полученным в растровом электронном микроскопе

Abstract

The results of 3D surface reconstruction using stereo Scanning Electron Microscopy images of silicon structures with trapezoidal relief elements and the same structures covered with Au islands are reported. The results are compared with those obtained by transmission scanning electron microscopy (STEM) and atomic force microscopy (AFM). It was found that the formation of Au island film on the surface of investigated structure with a mean particle size of about 10 nm can improve the accuracy of the results of 3D surface reconstruction. The error of the protrusions height value measuring by this method is less than 4 % for 597-600 nm.