Моделирование и оценка параметровморфологии поверхностей тонких пленок нанои микроэлектромеханических систем
Abstract
The thin film nano-and microelectromechanical systems of pressure sensors, experimental and theoretical methods of study and estimation results of films surfaces morphology are considered. The model and algorithm of thin filmsgrowth with taking into account the particlesdiffusion is developed.
About the Authors
В. Васильев
Пензенский государственный университет, Пенза
Russian Federation
Russian Federation
П. Чернов
Пензенский государственный университет, Пенза
Russian Federation
Russian Federation
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Review
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, . Izmeritel`naya Tekhnika. 2012;(12):13-16. (In Russ.)
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