Трехмерная реконструкция поверхностей рельефных структур по стереоизображениям, полученным в растровом электронном микроскопе

A method of 3D reconstruction by stereo scanning electron microscope images for calculation of the surface profile of two samples comprising trapezoidal protrusions in single-crystal silicon was applied. It is shown that the average value of the protrusions height calculated by 3D reconstruction differs from atomic force microscope (AFM) results by 2.3 % for the first sample. For the second sample additionally treated by plasma magnitudes of the protrusions obtained by both methods differ by the value less than AFM error. Better accuracy of 3D reconstruction for second sample can be explained by formation of nanometer-sized features on its surface as a result of plasma treatment improving the precision of image superposition during the 3D reconstruction.

3D-реконструкция, профиль поверхности, растровый электронный микроскоп, атомно-силовая микроскопия, стереоизображения, рельефные элементы, 3D reconstruction, surface profile, scanning electron microscope, stereo-pair images, relief elements

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