A calibration system for regular surface roughness measures based on a stylus profilometer and a laser displacement interferometer

The article describes the developed system of calibration of measures of regular surface roughness using a stylus profilometer based on Form Talysurf PGI and a laser displacement interferometer XL-80. Based on the analysis of foreign developments and experimental studies of the metrological characteristics of unit length measures in the lateral (1D and 2D reference gratings) and vertical directions, the requirements for a reference installation based on the Form Talysurf PGI profilometer and for calibration parameters of trapezoidal roughness samples are formulated. For traceability to the definition of the unit of length-meter in the SI stylus profilometer system in the vertical direction along the OZ axis, a phase grating interferometer was used in the reference instrument Form Talysurf PGI as part of the GET 113-2014. For traceability to the definition of the length unit-meter in the SI probe profilometer Form Talysurf PGI system in the lateral direction along the OX axis, a measuring system has been developed in which reflector of XL-80 laser displacement interferometer is installed on the traverse unit of the profilometer. To test the developed calibration system for regular surface roughness measures, grids with step values of 20 μm, 50 μm, and 100 μm were calibrated. Experimental studies were conducted for a set of developed standards for transferring the unit of length in the fi eld of measuring surface roughness parameters in the lateral and vertical directions. The calibration uncertainty (±2σ) was estimated according to the measurement uncertainty budget analysis. The expended uncertainty of the calibration (±2σ) of Ra standards (nominal value 0.03–0.04 μm) are in range 0.06–0.18 μm and in the range of 0.06–0.18 μm for pitch parameter (nominal value of Sm 100, 50, 20 μm). A set of height and pitch roughness parameters calibrated using the developed measurement system with calculated extended calibration uncertainties is designed to transfer units of length to measuring instruments in the fi eld of measuring surface roughness parameters in the lateral and vertical directions.

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