For citations:

Tyurin D.N., Kotenev V.A. Phase-spectral ellipsometry method for non-destructive control of the chemical composition of thin metal-oxide heterostructures. Izmeritel`naya Tekhnika. 2022;(8):62-67. (In Russ.) https://doi.org/10.32446/0368-1025it.2022-8-62-67