Compensation of the infl uence of linear acceleration on the parameters of the frame micro optoelectromechanical angular velocity transducer

The problem of reducing the infl uence of external destabilizing factors on microelectromechanical angular velocity transducers is considered. It is shown that for measurements of small angular velocities of the order of a few tens of microradians per second, it is preferable to use micro optoelectromechanical transducers containing optical readout nodes. The effect of linear acceleration on the characteristics of a frame micro optoelectromechanical angular velocity transducer with two optical readout channels is studied. Two methods of error compensation when the frame micro optoelectromechanical transducer is subjected to linear acceleration are considered. The compensation methods implement gain control and force feedback. Experimentally investigated the readout node based on the optical tunnel effect and used for precision measurement of the amplitude of oscillations of the sensitive element; the function of converting the amplitude of oscillations of the sensitive element into the voltage was obtained. The possibility of forming output signals of the transducer proportional to angular velocity and linear acceleration is shown. For different ranges of angular velocities, the dependences of changes in the gain from the zero offset voltage, proportional to the acting linear acceleration, are presented. A system for compensating the force effect of a destabilizing linear acceleration, consisting of a low-pass fi lter, a proportional-integral regulator, and an additional pair of comb-type electrostatic actuators is proposed. The additional actuators are arranged perpendicular to the actuators that excite the primary vibrations. The estimation of the measurement error of angular velocity when using two methods of compensation is presented. The proposed technical solutions allow increasing the accuracy of angular velocity measurements by micro optoelectromechanical transducers used in navigation and orientation systems of unmanned aircrafts of various types.

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