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Application of f exible waveguides for vibroacoustic monitoring of technological processes in vacuum chambers
https://doi.org/10.32446/0368-1025it.2022-3-59-64
Abstract
Monitoring of vibroacoustic signals accompanying various technological processes in many cases allows you to create monitoring systems that provide information about the progress of the process itself, about the condition of the tool, about the need to correct processing modes, etc. However, there are situations when vibration control in the working area is complicated by the conditions of the processing process itself. A vivid example of such a situation is electron-beam doping in a vacuum chamber. The article presents the results of research on the possibility of obtaining vibroacoustic information from the working area of a vacuum chamber using a fl exible waveguide. The infl uence on the transmission coeffi cient of the waveguide of its cross-sectional area, the presence of a seal at the entrance to the vacuum chamber, additional tension is considered. The presented results speak about the prospects of using fl exible waveguides in hard-to-reach places of the workspace.
Keywords
vibroacoustic diagnostics,
monitoring,
vacuum chamber,
electron beam technologies,
fl exible waveguides,
spectral analysis,
frequency range,
transmission coeffi cient
Supporting agencies: : these studies were carried out with the fi nancial support of the Ministry of Science and Higher Education of the Russian Federation as part of the assignment in the fi eld of scientifi c activity (project no. FSFS-2021-0003).
About the Authors
M. P. Kozochkin
Moscow State University of Technology STANKIN
Russian Federation
Russian Federation
Michail P. Kozochkin
Moscow
F. S. Sabirov
Moscow State University of Technology STANKIN
Russian Federation
Russian Federation
Fan S. Sabirov
Moscow
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Review
For citations:
Kozochkin M.P., Sabirov F.S. Application of f exible waveguides for vibroacoustic monitoring of technological processes in vacuum chambers. Izmeritel`naya Tekhnika. 2022;(3):59-64. (In Russ.) https://doi.org/10.32446/0368-1025it.2022-3-59-64
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