<?xml version="1.0" encoding="UTF-8"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "JATS-journalpublishing1-3.dtd">
<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">izmertech</journal-id><journal-title-group><journal-title xml:lang="ru">Измерительная техника</journal-title><trans-title-group xml:lang="en"><trans-title>Izmeritel`naya Tekhnika</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">0368-1025</issn><issn pub-type="epub">2949-5237</issn><publisher><publisher-name>ФГУП "ВНИИФТРИ"</publisher-name></publisher></journal-meta><article-meta><article-id custom-type="elpub" pub-id-type="custom">izmertech-511</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>НАНОМЕТРОЛОГИЯ</subject></subj-group></article-categories><title-group><article-title>Разработка стандартных образцов и методов калибровки малоугловых рентгеновских дифрактометров для сертификации и стандартизации продукции наноиндустрии</article-title><trans-title-group xml:lang="en"><trans-title></trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Авилов</surname><given-names>А. С.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Батурин</surname><given-names>А. С.</given-names></name></name-alternatives><email xlink:type="simple">fgupnicpv@mail.ru</email><xref ref-type="aff" rid="aff-2"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Волков</surname><given-names>В. В.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Дьякова</surname><given-names>Ю. А.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Ермакова</surname><given-names>М. А.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-3"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Кузин</surname><given-names>А. Ю.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-2"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Марченкова</surname><given-names>М. А.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Митюхляев</surname><given-names>В. Б.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-2"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Серегин</surname><given-names>А. Ю.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Сульянов</surname><given-names>С. Н.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Терещенко</surname><given-names>Е. Ю.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Тодуа</surname><given-names>П. А.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-3"/></contrib></contrib-group><aff xml:lang="ru" id="aff-1"><institution>Институт кристаллографии им. А.В. Шубникова РАН</institution><country>Russian Federation</country></aff><aff xml:lang="ru" id="aff-2"><institution>Научно-исследовательский центр по изучению свойств поверхности и вакуума</institution><country>Russian Federation</country></aff><aff xml:lang="ru" id="aff-3"><institution>Московский физико-технический институт</institution><country>Russian Federation</country></aff><pub-date pub-type="collection"><year>2013</year></pub-date><pub-date pub-type="epub"><day>07</day><month>02</month><year>2023</year></pub-date><volume>0</volume><issue>9</issue><fpage>27</fpage><lpage>31</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; ФГУП "ВНИИФТРИ", 2023</copyright-statement><copyright-year>2023</copyright-year><copyright-holder xml:lang="ru">ФГУП "ВНИИФТРИ"</copyright-holder><copyright-holder xml:lang="en">ФГУП "ВНИИФТРИ"</copyright-holder><license xlink:href="https://www.izmt.ru/jour/about/submissions#copyrightNotice" xlink:type="simple"><license-p>https://www.izmt.ru/jour/about/submissions#copyrightNotice</license-p></license></permissions><self-uri xlink:href="https://www.izmt.ru/jour/article/view/511">https://www.izmt.ru/jour/article/view/511</self-uri><abstract><p>Разработаны стандартные образцы толщины бислоев ленгмюровских пленок стеарата свинца на кварцевой подложке и методы калибровки с их использованием малоугловых рентгеновских дифрактометров.</p></abstract><trans-abstract xml:lang="en"><p>The certified reference materials (RM) of the thickness of bilayers of Langmuir-Blodgett PbSt2 films on the quartz substrate for calibration of small-angle X-ray diffractometers used for certification and standardization of nanoindustry productions were developed.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>стандартные образцы</kwd><kwd>ленгмюровские пленки</kwd><kwd>малоугловые рентгеновские дифрактометры</kwd><kwd>калибровка</kwd><kwd>certified reference materials</kwd><kwd>Langmuir-Blodgett films</kwd><kwd>small-angle X-ray diffractometers</kwd><kwd>calibration</kwd></kwd-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Blodgett K. 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