izmertechИзмерительная техникаIzmeritel`naya Tekhnika0368-10252949-5237ФГУП "ВНИИФТРИ"10.32446/0368-1025it.2024-11-27-35izmertech-2247Research ArticleТЕПЛОФИЗИЧЕСКИЕ ИЗМЕРЕНИЯTHERMOPHYSIC MEASUREMENTSМетод определения параметров обратимого эффекта памяти формы в аморфно-кристаллических лентах из сплава TiNiCuMethod for determining parameters of two-way shape memory effect in amorphous-crystalline TiNiCu alloy ribbonshttps://orcid.org/0000-0002-2603-6648ШеляковА. В.ShelyakovAlexander V.

Александр Васильевич Шеляков, доцент Кафедры физики твердого тела и наносистем,

Москва.

Moscow.

alex-shel@mail.ruХачатрянД. А.KhachatrianDavid A.

Давид Арменович Хачатрян, студент магистратуры, Кафедра физики твердого тела и наносистем,

Москва.

Moscow.

david.kha78@gmail.comБородакоК. А.BorodakoKirill A.

Кирилл Анатольевич Бородако, инженер Кафедры физики твердого тела и наносистем,

Москва.

Moscow.

borodako_kir@mail.ruhttps://orcid.org/0000-0002-2786-914XСитниковН. Н.SitnikovNikolay N.

Николай Николаевич Ситников, заместитель начальника отдела – начальник стендовой базы,

Москва.

Moscow.

sitnikov_nikolay@mail.ruНациональный исследовательский ядерный университет "МИФИ"РоссияNational Research Nuclear University MEPhI (Moscow Engineering Physics Institute)Russian FederationНациональный исследовательский ядерный университет «МИФИ»; Государственный научный центр Российской Федерации «Исследовательский центр имени М. В. Келдыша»РоссияNational Research Nuclear University MEPhI (Moscow Engineering Physics Institute); State Scientifi c Center of the Russian Federation “Keldysh Research Center”Russian Federation2024051220240112735Copyright © Шеляков А.В., Хачатрян Д.А., Бородако К.А., Ситников Н.Н., 20252025Шеляков А.В., Хачатрян Д.А., Бородако К.А., Ситников Н.Н.Shelyakov A.V., Khachatrian D.A., Borodako K.A., Sitnikov N.N.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://www.izmt.ru/jour/article/view/2247

Статья посвящена актуальной задаче создания эффективных микромеханических инструментов манипулирования микрообъектами для микроэлектромеханических систем. В последнее время для создания микропинцетов успешно применяют слоистые аморфно-кристаллические ленты из быстрозакалённого сплава TiNiCu с обратимым эффектом памяти формы. Описан метод и разработана оригинальная экспериментальная установка для определения параметров обратимого эффекта памяти формы таких лент. Исследованы термомеханические характеристики аморфно-кристаллического композита, полученного методом спиннингования расплава: толщина аморфного и кристаллического слоёв соответственно 25 и 7 мкм. Изучено влияние многократного термоциклирования в интервале проявления эффекта памяти формы. Полученная максимальная обратимая деформация ленты на изгиб превышает 0,2 %, что обеспечивает возможность создания микромеханических устройств (микропинцетов). Увеличение количества термоциклов от 1 до 100 приводит к заметному увеличению обратимой деформации (в 1,2 раза) и почти двукратному сужению температурного гистерезиса обратимого эффекта памяти формы. При этом характеристические температуры изменяются незначительно, за исключением заметно увеличивающейся температуры начала формоизменения при охлаждении. Полученные результаты позволяют улучшить функциональные характеристики микромеханических инструментов на основе аморфно-кристаллических лент из сплава TiNiCu, так как повышается надёжность и быстродействие таких инструментов, а также уменьшаются их габаритные размеры.

This article addresses an urgent challenge in the development of effi cient micromechanical tools for the manipulation of microobjects related to microelectromechanical systems. Recently, layered amorphous-crystalline ribbons of rapidly quenched TiNiCu alloy exhibiting a two-way shape memory effect have been successfully used to create microtweezers. The study outlines a method and presents an original experimental setup designed to determine the parameters associated with the two-way shape memory effect in such ribbons. The thermomechanical properties of an amorphous-crystalline composite, characterized by an amorphous layer thickness of 25 μm and a crystalline layer thickness of 7 μm, produced by melt spinning technique, were investigated. The effect of multiple thermal cycles in the shape memory effect temperature range was studied. The maximum reversible bending strain observed in the ribbon exceeds 0.2 %, which facilitates the development of micromechanical devices such as microtweezers. An increase in the number of thermal cycles from 1 to 100 resulted in a signifi cant enhancement of the reversible strain (by approximately 1.2 times) and a nearly twofold reduction in the temperature hysteresis associated with the two-way shape memory effect. The characteristic temperatures exhibited minimal variation, with the exception of the onset temperature of shape change during cooling, which showed a marked increase. The results obtained make it possible to improve the functional characteristics of micromechanical devices, based on amorphous-crystalline TiNiCu alloy ribbons by increasing their reliability and operational speed, as well as reducing their dimensions.

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The authors declare that there are no conflicts of interest present.