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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">izmertech</journal-id><journal-title-group><journal-title xml:lang="ru">Измерительная техника</journal-title><trans-title-group xml:lang="en"><trans-title>Izmeritel`naya Tekhnika</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">0368-1025</issn><issn pub-type="epub">2949-5237</issn><publisher><publisher-name>ФГУП "ВНИИФТРИ"</publisher-name></publisher></journal-meta><article-meta><article-id custom-type="elpub" pub-id-type="custom">izmertech-182</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>НАНОМЕТРОЛОГИЯ</subject></subj-group></article-categories><title-group><article-title>Особенности примененияупорядоченных пленок молекул фуллеренов для калибровки сканирующих туннельных микроскоповпри измерении геометрических параметров объектов</article-title><trans-title-group xml:lang="en"><trans-title></trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Кузин</surname><given-names>А. Ю.</given-names></name></name-alternatives><email xlink:type="simple">fgupnicpv@mail.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Тодуа</surname><given-names>П. А.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Панов</surname><given-names>В. И.</given-names></name></name-alternatives><email xlink:type="simple">spm@spmlab.phys.msu.ru</email><xref ref-type="aff" rid="aff-2"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Орешкин</surname><given-names>А. И.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-2"/></contrib></contrib-group><aff xml:lang="ru" id="aff-1"><institution>Научно-исследовательский центр по изучению свойств поверхности и вакуума,Москва</institution><country>Russian Federation</country></aff><aff xml:lang="ru" id="aff-2"><institution>Московский государственный университет им. М.В. Ломоносова, Москва</institution><country>Russian Federation</country></aff><pub-date pub-type="collection"><year>2013</year></pub-date><pub-date pub-type="epub"><day>07</day><month>02</month><year>2023</year></pub-date><volume>0</volume><issue>2</issue><fpage>10</fpage><lpage>15</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; ФГУП "ВНИИФТРИ", 2023</copyright-statement><copyright-year>2023</copyright-year><copyright-holder xml:lang="ru">ФГУП "ВНИИФТРИ"</copyright-holder><copyright-holder xml:lang="en">ФГУП "ВНИИФТРИ"</copyright-holder><license xlink:href="https://www.izmt.ru/jour/about/submissions#copyrightNotice" xlink:type="simple"><license-p>https://www.izmt.ru/jour/about/submissions#copyrightNotice</license-p></license></permissions><self-uri xlink:href="https://www.izmt.ru/jour/article/view/182">https://www.izmt.ru/jour/article/view/182</self-uri><abstract><p>Продемонстрирована возможность использования упорядоченных пленок молекул фуллеренов в качестве эталонных объектов для калибровки сканирующих туннельных микроскопов.</p></abstract><trans-abstract xml:lang="en"><p>The possibility of application of ordered films of fulleren molecules as reference samples for scanning tunnel microscope calibration has been demonstrated.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>сканирующий туннельный микроскоп</kwd><kwd>фуллерен</kwd><kwd>калибровка</kwd><kwd>реконструкция кремния</kwd><kwd>scanning tunnel microscope</kwd><kwd>fulleren</kwd><kwd>calibration</kwd><kwd>silicon reconstruction</kwd></kwd-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Binnig G., Rohrer H.Scanning tunneling microscopy // Helv. 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