izmertechИзмерительная техникаIzmeritel`naya Tekhnika0368-10252949-5237ФГУП "ВНИИФТРИ"izmertech-1316Research ArticleК ЮБИЛЕЮ ВНИИОФИСпектральный анализ метода измерений фазового сдвига по интерферограммамВишняковГ. Н.minaev@vniiofi.ruЛевинГ. Г.noemail@neicon.ruМинаевВ. Л.noemail@neicon.ruВсероссийский научно-исследовательский институт оптико-физических измеренийRussian Federation2015070220230113437Copyright © ФГУП "ВНИИФТРИ", 20232023ФГУП "ВНИИФТРИ"ФГУП "ВНИИФТРИ"https://www.izmt.ru/jour/about/submissions#copyrightNoticehttps://www.izmt.ru/jour/article/view/1316

Приведен спектральный анализ метода измерений фазового сдвига по интерферограммам на основе разностей между ними. Объяснены ограничения метода и выявлены пути повышения его точности. Рассмотрено влияние фазового сдвига и аддитивного шума на погрешность измерений.

This paper describes the spectral analysis of method of phase shift measurement by interferograms based on differences between them. Such analysis helps to show restrictions of the method and the ways of accuracy increase. The effect of phase shift value and additive noise over phase shift measurement accuracy is considered.

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The authors declare that there are no conflicts of interest present.